BEAMeeting 2015 in Munich Technical Workshop

Software solution for
optimization of micro & nano
fabrication processes
BEAMeeting 2015 in Munich
Technical Workshop & Discussion
Monday March 16th and Tuesday March 17th , 2015
Monday 11:30 am
Tuesday around 15:00 pm
Start with a lunch buffet at GenISys GmbH
Eschenstr. 66, 82024 Taufkirchen
After Lunch the BEAMeeting will be held:
in Hotel Sauerlacher Post
Tegernseer Landstraße 2
82054 Sauerlach near Munich
Easy to reach by car and by city train (S3)
Contact person: Adriane Doms
Tel: +49-89 330 9197 - 60
e-mail: [email protected]
Our BEAMeetings are focussed on e-beam lithography, data-preparation, PEC, process correction, and ebeam simulation. The meeting is a technical exchange platform for BEAMER users and those who are
interested in BEAMER. Please bring inputs on any topic of your preference. User presentations on
applications, solutions for specific issues and needs. Please let us know if you would like to give a short
presentation. Any application cases showing solutions or issues are highly welcome. The final agenda will
be based on all your inputs. Do not hesitate to communicate requests and suggestions to make the
BEAMeeting most interesting and valuable for the BEAMER community.
We have a hotel contingent in the above hotel – room per night/person: Euro 75,50 incl. breakfast.
Due to the arrangements we have to make for this event, we would very much appreciate receiving your
feedback: “I will attend, I will not attend” – very soon. For registration and hotel accommodation please
contact : Adriane Doms– [email protected]
On Monday Evening we like to take you out for a Bavarian Dinner in a very famous Munich Restaurant !
See you in Munich – The GenISys Team
GenISys GmbH, Eschenstr. 66, D-82024 Taufkirchen/Germany
Tel. +49-(0)89-330919760 – Fax +49 (0)89-330919761